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THIN FILM DEPOSITION
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Parylene Deposition

CAC Name: Parylene

Tool for depositing conformal parylene films (Rm 228)

Parylene Tool
Manager: Beth Rhoades
Backup: Christopher Alpha
Equipment Training
Training is offered by small group session is offered every couple of weeks. Since a typical deposition takes ~5hrs, the training is broken into 2 parts. First part lasts 1 hour, upon completion of the process 1hr is spent on unloading and cleaning. If you have a specific need for training, email the tool manager to request a training session. First training session is scheduled for Thursday March 31st and will begin at 8am. Training is limited to 6 individuals. Users will return at noon for sample unloading and tool cleaning. Please email rob@cnf.cornell.edu if you wish to sign up for the March 31 training session.
There are no training sessions currently scheduled.

Description:

Model PDS 2010 LABCOTER deposition system is the first portable system designed for deposition of protective Parylene conformal coating. This unit is suitable for laboratory research applications, circuit board repairs, electronic sensors, medical components, organic samples, and many other substrates.

The deposition process begins with the granular form of Parylene, raw material Dimer, the material is vaporized under vacuum and heated to a dimeric gas. The gas is then pyrolized to cleave the dimer to its monomeric form. In the room temperature deposition chamber, the monomer gas deposits as a transparent polymer film. The required thickness of a coating can vary based on the application, but thickness can range from the hundreds of angstroms to several microns.

Capabilities:

Good to excellent adhesion of Parylene to a wide variety of substrates can be achieved by the simple treatment with a dilute solution of an organic silane prior to Parylene coating. Parylene exhibits very little absorption in the visible region and is, therefore, transparent and colorless. Below about 280 nm both Parylene N and C absorb strongly. The Parylenes resist room temperature chemical attack and are insoluble in all organic solvents up to 150° C. Furthermore, chemical resistance and moisture vapor permeability rates for Parylene C are superior to almost all polymeric materials.


Additional Resources:

Equipment Information Sheet
Quick Start Instructions


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