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YES Image Reversal Oven

CAC Name: YES NH3

Photoresist image reversal oven

YES-58SM Image Reversal Oven Backup: Edward Camacho , Michael Skvarla
Equipment Training
Training is given one-on-one as needed. Please contact the tool manager to schedule training.

Description:

The YES 58-SM oven uses NH3 (ammonia) gas to reverse the tone of positive photoresist. This can be used to create an undercut profile in the photoresist for lift-off processing. In the reversal process, the chamber is purged of oxygen using vacuum and heat. It is then filled with 600 Torr of NH3 (ammonia) vapor. The NH3 reacts with the acid in the exposed resist rendering it insoluble in developer. The proceeding flood exposure causes acid to form in the previously unexposed areas allowing them to be removed in development, leaving behind the negative image of the first exposure. A descum process using O2 plasma is recommended after lift-off to promote good adhesion of deposited material

Capabilities:

  • NH3 environment
  • Undercut profiles for liftoff


Additional Resources:

Equipment Information Sheet
Image Reversal Basics
YES Image Reversal Oven Instructions


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

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