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PHOTOLITHOGRAPHY
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Manual Resist Spinners

Resist Spinners

Manual Resist Spinners Backup: Garry Bordonaro
Equipment Training
Training is usually offered weekly on Tuesdays at 1:30pm and is held in the photolithography spinner room. You do not need to sign up for training.

Description:

The CNF has several general use manual resist spinners. The spinners are segregated according to solvent compatibility.


Additional Resources:

Equipment Information Sheet


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

EQUIPMENT LIST


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