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Zeiss Ultra SEM

Ultra High Resolution Field Emission SEM

Zeiss Ultra SEM Backup: John Treichler , Amrita Banerjee
Equipment Training
Please sign up online for training, using the links below.

Please do not come to the training unless you have a sample ready to image. You will be required to use the SEM within one week of training or your access may be removed.

There are no training sessions currently scheduled.


Scanning electron microscopy is critical for the analysis of nanoscale materials and structures. CNF operates two field emission scanning electron microscopes (SEMs): a Zeiss Supra 55 microscope capable of variable pressure (VP) operation and a Zeiss Ultra 55 microscope optimized for high resolution imaging. Like most modern SEMs, both systems are capable of operating at beam energies from 100 V to 30 kV. However, the unique electron optical design employed in the Zeiss systems enables unsurpassed performance at beam energies from 100 V to 8 kV. This is crucial for obtaining high resolution distortion free images of surface.

The Ultra 55 is designed to maximize imaging resolution at low beam energies. It is equipped with a backscatter electron detector engineered to image electrons with energies less than 2 keV. An energy filter incorporated into the detector enables energy selective backscatter (ESB) imaging. This signal can be used to obtain contrast between regions of different composition.


  • In Lens Energy Selective Backscatter (ESB) Detector
  • Backscatter imaging using 100 eV to 3 keV beam energies
  • In situ electrical characterization of samples using the installed Zyvex system

Additional Resources:

Equipment Information Sheet
CNF SEM basics
JEOL guide to SEM
CNF SEM video training reference
Location of tool in cleanroom (jpg)

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Bruker Icon is BACK...
Oct 20, 2017
Good news everyone!
Icon Controller is back after a major repair. Tool is running again.
Thanks for waiting patiently.
Note: Please remember to handle the scanner head gently and please do not put your feet under the table near the controllers.



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