ComputingCleanroom and Equipment StatusCoral - XReporter
Button: Equipment ListButton: MSDS DatabaseButton: Policies & FormsButton: Education & TrainingButton: StaffButton: Events & Seminars Button: Publication Button: About CNF Button: Lab Manual

ETCHING
     Schedule Training   ¦



Trion Etcher

Cr ICP system

Manager: Jeremy Clark
Backup: Tom Pennell , Vince Genova
Equipment Training
Training is scheduled on an as needed basis. Email your request.

Description:

Trion Minilock III is an RIE/ICP system who purpose is to etch Chrome.

Capabilities:

The system has both chlorinated and fluorinated gases and is capable of handling up to 8-inch wafers and 7" square plates.

Processes Available:

Chrome etch processes are presently available on the tool.


Additional Resources:

Equipment Information Sheet


Back to Top


EQUIPMENT LIST


Button: Search Button: Search Keywords
Cornell University
NYSTARNNCINSF