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YES Vapor Prime Oven

CAC Name: YES

Vacuum oven for HMDS wafer priming

Yield Engineering Systems LP-III Vapor Prime Oven Backup: Edward Camacho , Michael Skvarla
Equipment Training
Training is given one-on-one to users on request. Please contact the tool manager for training.

Description:

The YES LP-III is a vacuum oven that can be used for HMDS vapor priming. Using hexamethyldisilazane (HMDS), the unit functions as a standard vacuum vapor primer. Clean wafers are dehydrated through a series of heated (150C) evacuation and dry N2 (nitrogen) refills. HMDS vapor then evaporates into the evacuated chamber forming a monolayer on the wafer surfaces. Vapor priming is used to improve the adhesion of the photoresist to the wafer.

Capabilities:

  • HMDS vapor priming for improved adhesion of photoresist


Additional Resources:

Equipment Information Sheet


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

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