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YES Vapor Prime Oven

CAC Name: YES

Vacuum oven for HMDS wafer priming

Yield Engineering Systems LP-III Vapor Prime Oven Backup: Edward Camacho , Michael Skvarla
Equipment Training
Training is given one-on-one to users on request. Please contact the tool manager for training.

Description:

The YES LP-III is a vacuum oven that can be used for HMDS vapor priming. Using hexamethyldisilazane (HMDS), the unit functions as a standard vacuum vapor primer. Clean wafers are dehydrated through a series of heated (150C) evacuation and dry N2 (nitrogen) refills. HMDS vapor then evaporates into the evacuated chamber forming a monolayer on the wafer surfaces. Vapor priming is used to improve the adhesion of the photoresist to the wafer.

Capabilities:

  • HMDS vapor priming for improved adhesion of photoresist


Additional Resources:

Equipment Information Sheet


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ASML DUV Stepper *UNAVAILABLE* December 18th-21st
Nov 17, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning December 18th. Please plan accordingly.

Garry

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