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PHOTOLITHOGRAPHY
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Nanoimprint NX-2500

CAC Name: NX2500

Nanoimprint Lithography

Nanonex NanoImprint Tool Backup: John Treichler
Equipment Training
Training is held biweekly On Wednesdays from 10am to 11pm. Check Schedule Training on web page. Please be there on time.
There are no training sessions currently scheduled.

Description:

The NX-2500 is a multi-level nanoimprintor with imprint capabilities in thermoplastic, photo-curable and embossing. It offers excellent uniformity regardless of backside roughness of substrate and template and can correct waving and bowing of surfaces. This machine also eliminates relative lateral shifting between substrate and mold which affects mold lifetime. A very small thermal mass ensure rapid and cooling, resulting in fast process cycles.

Capabilities:

Air Cushion Press, Excellent Uniformity, High Throughput

Sub 10nm Resolution (Template dependent)

Sub 1um Overlay Alighment

Fast Cycle Time (Sub-60sec)

Thermoplastic Imprint module
Temperature Range of 0 to 300 Deg C
Heating Rate >300 Deg C/min
Cooling Rate >300 Deg C/min
Pressure Range of 0 to 4 Mpa

Photocuring Module
200 W Narrow Band UV Lamp
Automatic Control

Mask Loading Capabilities
4,5, and 6 inch Masks

Substrate Handling
Maximum 100mm wafers
Unique Ability to Handle Irregular Shapes and Sizes

Overlay
< 1 um 3 sigma Overlay Accuracy
X, Y ,Z Theta Stage
Split Field Optics and CCD Camera

Processes Available:

Thermoplastic, Photocurable, Embossing

Applications:

Nanophotonics, Displays, Data Storage, Advance Materials, Biotechnology, Nano-fluidics, etc.


Additional Resources:

Equipment Information Sheet


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Photolithography Training Sessions for the Week of September 18th
Sep 18, 2017
General Photolithography training will be offered Tuesday at 1:30PM. We will meet in the Spinner room.

Heidelberg DWL2000 Mask Writer Training will be offered Wednesday at 3:30PM. Meet at the tool.

AB-M contact aligner, Schott IR inspection tool, MA6 contact aligner, and Wafer Bonder training can be scheduled with Edward Camacho.

________


For any other training sessions, this week contact the tool owner for scheduling. Please review the materials available at each of the web page ...more
ASML DUV Stepper *UNAVAILABLE* Thursday September 21st 9:00 am - Noon
Sep 14, 2017
The ASML DUV Stepper will be UNAVAILABLE Thursday, September 21st, as ASML will be performing diagnostics on the tool.

Garry

EQUIPMENT LIST


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