CNF - Lab and Equipment Information

PHOTOLITHOGRAPHY

Schedule Training ¦

Nanoimprint NX-2500

CAC Name: NX2500

Nanoimprint Lithography

Manager: Edward Camacho

Backup: John Treichler

Equipment Training
Biweekly On Wednesdays at 10am to 11pm. Check Schedule Training on web page. Be there on time.

There are no training sessions currently scheduled.

Description:

The NX-2500 is a multi-level nanoimprintor with imprint capabilities in thermoplastic, photo-curable and embossing. It offers excellent uniformity regardless of backside roughness of substrate and template and can correct waving and bowing of surfaces. This machine also eliminates relative lateral shifting between substrate and mold which affects mold lifetime. A very small thermal mass ensure rapid and cooling, resulting in fast process cycles.

Capabilities:

Air Cushion Press, Excellent Uniformity, High Throughput

Sub 10nm Resolution (Template dependent)

Sub 1um Overlay Alighment

Fast Cycle Time (Sub-60sec)

Thermoplastic Imprint module
Temperature Range of 0 to 300 Deg C
Heating Rate >300 Deg C/min
Cooling Rate >300 Deg C/min
Pressure Range of 0 to 4 Mpa

Photocuring Module
200 W Narrow Band UV Lamp
Automatic Control

Mask Loading Capabilities
4,5, and 6 inch Masks

Substrate Handling
Maximum 100mm wafers
Unique Ability to Handle Irregular Shapes and Sizes

Overlay
< 1 um 3 sigma Overlay Accuracy
X, Y ,Z Theta Stage
Split Field Optics and CCD Camera

Processes Available:

Thermoplastic, Photocurable, Embossing

Applications:

Nanophotonics, Displays, Data Storage, Advance Materials, Biotechnology, Nano-fluidics, etc.

Additional Resources:

Equipment Information Sheet

Back to Top

PG Mask Writer Training
Nov 23, 2009
General Pattern Generator training will be Wednesday the 25th at 2pm.

Edward Camacho
PG Mask Writer

Photolith Training Sessions Week of November 23rd
Nov 23, 2009
This week's General Photolithography training session will meet in the resist spinner room Tuesday, November 24th, at 1:30 PM. This week's Pattern Generator training session will meet at the tool Wednesday, November 25th, at 2:00 PM (See other notice.) No pre-registration is necessary.

Notice Archive

This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

Cornell NanoScale Science & Technology Facility (CNF)
250 Duffield Hall, Cornell University, Ithaca, New York 14853-2700
Voice: 607-255-2329, Fax: 607-255-8601, Email: information@cnf.cornell.edu