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YES Polyimide Bake Oven

CAC Name: YES POLY

Oven for curing polyimide and other polymer films

YES Polymide Bake Oven Backup: Michael Skvarla
Equipment Training
Training is done through a video over the web. Please select a link below to watch the video. Once you have watched the video you need to contact the tool manager to have your access enabled in CORAL.

Training Video

Description:

The 450PB is a high temperature vacuum oven using a programmable temperature controller and programmed vacuum and nitrogen flow cycles for curing of polyimide films. The unit features filtered heated nitrogen purging from the entire surface of the roof through the floor of the chamber. This flow acts to clean the wafers during the process.

Many thanks to Yield Engineering Systems (YES) for improved controller parameters leading to better temperature control.

Capabilities:

  • Capacity: Up to two boats of 6 inch wafers
  • Ramp: 8°C/min
  • Cool-down: 1-2°C/min
  • Max Temperature: 400°C
  • Idle Temperature: 50°C


Additional Resources:

Equipment Information Sheet
YES Polymide Instructions


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ASML DUV Stepper *UNAVAILABLE* December 18th-21st
Nov 17, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning December 18th. Please plan accordingly.

Garry

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