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Heidelberg Mask Writer DWL2000

CAC Name: DWL 2000

DWL2000 Laser Pattern Generator and Direct Writer

DWL2000 Backup: John Treichler
Equipment Training
Training is scheduled by need, please email requests for training to the tool manager. Once a need has been established registration for training sessions will be performed over the web. Training classes are limited to 3 users.

Description:

The Heidelberg Instruments DWL 2000 is an economical, high resolution direct write pattern generator for direct writing on photosensitive Cr mask plates. The tool can handle mask sizes from 3 to 9 inches. The unit has an interchangeable write head that can accommodate different feature sizes for writing. The smallest feature size is 0.7 microns and 0.6 microns with the 4mm and 2mm write heads, respectively.

DWL 2000 system consists of the main system unit, an XP-based PC for running job files, a Linux based PC for data conversion and a pattern generator (located in the service chase). The tool accepts files of various format, for best results use the semiconductor standard GDSII format.

Capabilities:

  • Write Lens 4mm - 0.7um nominal resolution at 110mm^2/min
  • Write Lens 2mm - 0,6um nominal resolution at 29mm^2/min
  • Direct write on masks 3 to 9 inches in extent
  • GDSII pattern files only


Additional Resources:

Equipment Information Sheet


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ASML DUV Stepper *UNAVAILABLE* December 18th-21st
Nov 17, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning December 18th. Please plan accordingly.

Garry

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