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PHOTOLITHOGRAPHY
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Heidelberg Mask Writer DWL2000

CAC Name: DWL 2000

DWL2000 Laser Pattern Generator and Direct Writer

DWL2000 Backup: John Treichler
Equipment Training
Training is scheduled by need, please email requests for training to the tool manager. Once a need has been established registration for training sessions will be performed over the web. Training classes are limited to 3 users.

Description:

The Heidelberg Instruments DWL 2000 is an economical, high resolution direct write pattern generator for direct writing on photosensitive Cr mask plates. The tool can handle mask sizes from 3 to 9 inches. The unit has an interchangeable write head that can accommodate different feature sizes for writing. The smallest feature size is 0.7 microns and 0.6 microns with the 4mm and 2mm write heads, respectively.

DWL 2000 system consists of the main system unit, an XP-based PC for running job files, a Linux based PC for data conversion and a pattern generator (located in the service chase). The tool accepts files of various format, for best results use the semiconductor standard GDSII format.

Capabilities:

  • Write Lens 4mm - 0.7um nominal resolution at 110mm^2/min
  • Write Lens 2mm - 0,6um nominal resolution at 29mm^2/min
  • Direct write on masks 3 to 9 inches in extent
  • GDSII pattern files only


Additional Resources:

Equipment Information Sheet


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Photolithography Training Sessions for the Week of September 18th
Sep 18, 2017
General Photolithography training will be offered Tuesday at 1:30PM. We will meet in the Spinner room.

Heidelberg DWL2000 Mask Writer Training will be offered Wednesday at 3:30PM. Meet at the tool.

AB-M contact aligner, Schott IR inspection tool, MA6 contact aligner, and Wafer Bonder training can be scheduled with Edward Camacho.

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For any other training sessions, this week contact the tool owner for scheduling. Please review the materials available at each of the web page ...more
ASML DUV Stepper *UNAVAILABLE* Thursday September 21st 9:00 am - Noon
Sep 14, 2017
The ASML DUV Stepper will be UNAVAILABLE Thursday, September 21st, as ASML will be performing diagnostics on the tool.

Garry

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