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PHOTOLITHOGRAPHY
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SU-8 Hotplates

CAC Name: SU-8 hotplates 1-4

Hotplates for baking SU-8-coated wafers

Manager: Beth Rhoades
Backup: Edward Camacho , Garry Bordonaro
Equipment Training
Training for first time use of the room is required.Contact Beth. Please adhere to the instructions on the Equipment Information Sheet.

Description:

9 hotplates are available for baking SU-8-coated substrates in the SU-8 lithography area (clean room 106).

Processes Available:

Hot plates have been grouped and labeled to accommodate both users with long and short bake processes
-3 Fairweather hotplates can be reserved for extended (more than 2 hrs) bake processes.
-3 EMI hotplates are available without reservations for shorted bake processes.
-2 EMI hotplates are available without reservations for bake processes with intermediate times (less than 2 hours).


Additional Resources:

Equipment Information Sheet


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

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