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PHOTOLITHOGRAPHY
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Photolithography Hot Plates

Hot plates for baking photoresist

Backup: Garry Bordonaro
Equipment Training
Use of these hot plates is covered in the general photolithography training held ever week on Tuesday at 1:30pm. Please sign up using the training scheduler.
There are no training sessions currently scheduled.

Description:

Hot plates and ovens used for baking photoresist


Additional Resources:

Equipment Information Sheet


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

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