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Photolithography Hot Plates

Hot plates for baking photoresist

Backup: Garry Bordonaro
Equipment Training
Use of these hot plates is covered in the general photolithography training held ever week on Tuesday at 1:30pm. Please sign up using the training scheduler.
There are no training sessions currently scheduled.


Hot plates and ovens used for baking photoresist

Additional Resources:

Equipment Information Sheet

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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.



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