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DECOMMISSIONED TOOL - Rudolph AutoEL IV Ellipsometers

Transparent Thin Film Measurement tool

Equipment Training
Training is usually offered weekly, and often at a time convenient to the needs of the new users for the week. Please contact the tool manager for the training schedule.


The AutoEl IV has automatic 3 wavelength operation and a scanning stage. Multiple wavelength operation gives this instrument more flexibility for meauring multiple film stacks. The scanning stage allows wafer uniformity to be measured. The system automatically calculates ellipsometric parameters, thickness, and index.

Additional Resources:

Equipment Information Sheet

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