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Olympus Confocal Microscope

Olympus BX60/U-CFU Real Time Confocal Microscope

Olympus Confocal Microscope Backup: Garry Bordonaro
Equipment Training
No formal training is required. For questions please contact the tool manager.

Description:

The Olympus BX60/U-CFU microscope employs a newly developed slit method scanning disk that blocks defocused reflected light from samples and allows only focused light to go through. It generates clear and high resolving images with 0.18-micron compatibility. A mercury lamp house is the standard light source, which provides a bright, clear image. The U-CFU has excellent Z-axis (vertical) detection. A layer in a multi-layer wafer can be observed distinguishably through this capability. (Photo below is linked to 300 dpi version.)


Additional Resources:

Equipment Information Sheet

Results:


Comparison of white light images of MEMS structures versus confocal images taken on the BX60.


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