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ETCHING
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Branson Resist Strip

CAC Name: BRANSON

Oxygen plasma barrel asher for Photoresist/organic removal

Branson/IPC P2000 Barrel Etcher Backup: Christopher Alpha
Equipment Training
Please contact the tool manager to schedule training.

Description:

The Branson P2000 barrel etcher can automatically preheat, etch, and strip up to 50 wafers at a time. The etcher has capabilities for resist stripping, and resist pattern descumming;

Capabilities:

  • Oxygen plasma stripping of resist
  • Oxygen plasma descum for liftoff


Additional Resources:

Equipment Information Sheet


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