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Glen 1000 Resist Strip

CAC Name: GLEN1000

Oxygen Plasma tool for removal of organics

Glen 1000p Plasma Cleaning System Backup: Vince Genova
Equipment Training
Please contact the tool manager to schedule training.

Description:

The Glen 1000 system utilizes a oxygen plasma source for stripping of photoresist and other organics. The tool can be setup to give direct ion bombardment or in a downstream ion mode for lower surface damage.


Additional Resources:

Equipment Information Sheet


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