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JBA 1000 Photoresist UV Cure

Tool for UV Curing of photoresist

Manager: Sam Wright
Backup: Edward Camacho
Equipment Training
Training is given one-on-one to users on request.

Description:

The JBA 1000 is a DUV exposure system intended for curing photoresist before hardbake. The gridlamp has ~15mW/cm2 output at 250nm. This energy will cause photoresist to crosslink at the surface, thus preventing resist flow at elevated temperatures required for hardbaking.


Additional Resources:

Equipment Information Sheet


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ASML DUV Stepper *UNAVAILABLE* December 18th-21st
Nov 17, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning December 18th. Please plan accordingly.

Garry

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