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PHOTOLITHOGRAPHY
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Hamatech-Steag Mask Processors

Automated Tools for Processing Photomasks

Hamatech Mask Processor Backup: Garry Bordonaro
Equipment Training
Online video training is available for these tools by following the links below. After watching the training video you are authorized to use the tools. Contact staff if you still have any questions.

Training Video - Window Media

Training Video - Quicktime

Description:

The CNF has a Hamatech-Steag HMP900 Mask processing system available for automatic mask developing and etching. There are currently 5 inch mask chucks available. Standard mask development processes and chrome etching should be done on this tool.

Capabilities:

  • 5
  • 6


Additional Resources:

Equipment Information Sheet
Training Video


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

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