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PHOTOLITHOGRAPHY
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Hamatech-Steag Mask Processors

Automated Tools for Processing Photomasks

Hamatech Mask Processor Backup: Garry Bordonaro
Equipment Training
Online video training is available for these tools by following the links below. After watching the training video you are authorized to use the tools. Contact staff if you still have any questions.

Training Video - Window Media

Training Video - Quicktime

Description:

The CNF has a Hamatech-Steag HMP900 Mask processing system available for automatic mask developing and etching. There are currently 5 inch mask chucks available. Standard mask development processes and chrome etching should be done on this tool.

Capabilities:

  • 5
  • 6


Additional Resources:

Equipment Information Sheet
Training Video


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Photolithography Training Sessions for the Week of September 18th
Sep 18, 2017
General Photolithography training will be offered Tuesday at 1:30PM. We will meet in the Spinner room.

Heidelberg DWL2000 Mask Writer Training will be offered Wednesday at 3:30PM. Meet at the tool.

AB-M contact aligner, Schott IR inspection tool, MA6 contact aligner, and Wafer Bonder training can be scheduled with Edward Camacho.

________


For any other training sessions, this week contact the tool owner for scheduling. Please review the materials available at each of the web page ...more
ASML DUV Stepper *UNAVAILABLE* Thursday September 21st 9:00 am - Noon
Sep 14, 2017
The ASML DUV Stepper will be UNAVAILABLE Thursday, September 21st, as ASML will be performing diagnostics on the tool.

Garry

EQUIPMENT LIST


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