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Hamatech-Steag Wafer Processors

CAC Name: 191/219

Automated Tools for Developing Wafers

Hamatech Wafer Processor Backup: Garry Bordonaro
Equipment Training
Online video training is available for these tools following the links below. After watching the training video you are authorized to use the tools. Contact staff if you still have any questions.

Training Video - Window Media

Training Video - Quicktime

Description:

The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, and 150 mm wafers. Standard developers are available on each tool.

Capabilities:

  • 3
  • 4
  • 6
  • Standard water developers


Additional Resources:

Equipment Information Sheet
Training Video


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DWL2000 *DOWN*
Dec 12, 2017
The DWL2000 is DOWN again due to focus system issues. HIMT is working on the problem. This notice will be updated as more info is available.

Garry
UPDATED - ASML DUV Stepper *UNAVAILABLE* January 9th - 12th
Dec 01, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning January 9th. Please plan accordingly.

Garry

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