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PHOTOLITHOGRAPHY
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Hamatech-Steag Wafer Processors

CAC Name: 191/219

Automated Tools for Developing Wafers

Hamatech Wafer Processor Backup: Garry Bordonaro
Equipment Training
Online video training is available for these tools following the links below. After watching the training video you are authorized to use the tools. Contact staff if you still have any questions.

Training Video - Window Media

Training Video - Quicktime

Description:

The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, and 150 mm wafers. Standard developers are available on each tool.

Capabilities:

  • 3
  • 4
  • 6
  • Standard water developers


Additional Resources:

Equipment Information Sheet
Training Video


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Photolithography Training Sessions for the Week of September 18th
Sep 18, 2017
General Photolithography training will be offered Tuesday at 1:30PM. We will meet in the Spinner room.

Heidelberg DWL2000 Mask Writer Training will be offered Wednesday at 3:30PM. Meet at the tool.

AB-M contact aligner, Schott IR inspection tool, MA6 contact aligner, and Wafer Bonder training can be scheduled with Edward Camacho.

________


For any other training sessions, this week contact the tool owner for scheduling. Please review the materials available at each of the web page ...more
ASML DUV Stepper *UNAVAILABLE* Thursday September 21st 9:00 am - Noon
Sep 14, 2017
The ASML DUV Stepper will be UNAVAILABLE Thursday, September 21st, as ASML will be performing diagnostics on the tool.

Garry

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