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Hamatech-Steag Wafer Processors

CAC Name: 191/219

Automated Tools for Developing Wafers

Hamatech Wafer Processor Backup: Garry Bordonaro
Equipment Training
Online video training is available for these tools following the links below. After watching the training video you are authorized to use the tools. Contact staff if you still have any questions.

Training Video - Window Media

Training Video - Quicktime

Description:

The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, and 150 mm wafers. Standard developers are available on each tool.

Capabilities:

  • 3
  • 4
  • 6
  • Standard water developers


Additional Resources:

Equipment Information Sheet
Training Video


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ASML DUV Stepper *UNAVAILABLE* December 18th-21st
Nov 17, 2017
The ASML DUV stepper will be unavailable due to a maintenance visit beginning December 18th. Please plan accordingly.

Garry

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