SubTitle
Automatic 4 point probe resitivity mapper
Training

For training, please contact the Tool Manager(s).

Additional Restrictions
  • Full size wafers up to 200mm can be processed. Pieces can be processed with staff assistance.
  • Semiconductors and metals only, no soft polymer materials, other materials with staff approval.
Manager
Backups:
Body

The CDE resistivity mapper is a 4 point probe system with an automatic stage. It can be used to measure the surface resistivity of thin films or with calibration, the thickness and uniformity of conductive thin films.