Automatic 4 point probe resitivity mapper

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Full size wafers up to 200mm can be processed. Pieces can be processed with staff assistance.
  • Semiconductors and metals only, no soft polymer materials, other materials with staff approval.
Manager
Phil Infante
Backups:
Aaron Windsor
CDE ResMap

The CDE resistivity mapper is a 4 point probe system with an automatic stage. It can be used to measure the surface resistivity of thin films or with calibration, the thickness and uniformity of conductive thin films.

Equipment Information Sheet