Notification
New distance function "Single Edge" feature type allows a single-edge position to be measured. Multiple measurements can now "share" a single Region of Interest (ROI). Line Width Roughness (LWR) is now computed together with Line Edge Roughness (LER) for lines, spaces and gratings. ProSEM Performance has been improved with respect to image loading and changing measurement. ProSEM project files are now saved using a binary file format by default resulting in 8 to 10 times smaller and faster project files. Edge detection and feature finding in batch mode has been improved.
Notice Area