DC Probe Station and Electronics
A Cascade Summit 12K probe station with 8-inch chuck is available for DC wafer probing. The system includes four high-precision Cascade 208 and 210 DC probe positioners with Kelvin probes, microscope, digital camera, and is coupled with a Temptronic TPO3000 ThermoChuck system with -50 to 200 °C chuck temperature control capability.