Metrology equipment for electrically testing semiconductor devices.
The Everbeing SR-4 manual 4-point probe station is used for measurements of sheet resistivity. It is used with a variety of current and voltage sources. This tool was donated to CNF by Everbeing in August 2016.
An Everbeing EB-6 high precision probe station is available for DC wafer probing. Four low noise, high precision probes are available along with a hot chuck, microscope, and digital camera. The EB-6 was donated to CNF by Everbeing in August 2016. Four high precision Keithley Source Measurement Units (SMU) with connected PC and software are used for voltage and current measurement.
This tool is configured around a Cascade Summit 12K probe station, including four Kelvin probes each mounted on a Cascade 208 or 210 probe positioner, an Agilent 4156C precision semiconductor parameter analyzer, an Agilent 4294A precision impedance analyzer, a Temptronic TPO3000 ThermoChuck system, a Kinetic Systems 1201 vibration-isolation table, and a personal computer running Keysight IC-CAP on Windows 10.
This tool is based on a Cascade Summit 9600 probe station on top of a Kinetic Systems 1201 vibration-isolation table. The probe station is equipped with two Cascade 103-754 x-y-z-θ probe positioners, a Mitutoyo 378-134-4 microscope (with long working distance and a built-in TV camera), and a 6"-diameter microchamber and thermal chuck (−50 to 200 °C). The thermal chuck is controlled by a Temptronic TPO3000 ThermoChuck system.
A Cascade Summit 11K probe station with a 200-mm wafer chuck is available for Terahertz large-signal probing. The tool includes Anritsu MS4647B 4-Port 70kHz-70GHz VNA, two VDI 110-170 GHz frequency extenders, power meters covering DC to THz range, and GSG or GSGSG probes for on-wafer probing. The tool is capable of both small- and large-signal RF measurements up to 170 GHz and 17 dBm power.
The tool is based on an MPI TS2000-IFE 200-mm automated probe station with micron precision. In the standard configuration, the tool includes two RF probes of GSG, GSSG or GSGSG types, a microscope, a digital camera, and a thermal chuck with temperature control between -60°C and +200 °C. Other DC and RF probes may be added. The probes, the microscope, and the chuck are all automatically controlled in x, y, and z directions with optical feedback. The RF signal is provided by an Anritsu 4-Port ME7838G vector network analyzer capable of a single sweep from 70 kHz to Fig. 2.
A Keithley C-V measurement system is coupled to the Everbeing Probe station and an Everbeing hot chuck capable of 300°C. The entire system is controlled by user-friendly PC software. Both high frequency and quasi-static measurements are available. Other measurements such as bias-temperature and zerbst C-t plots are also available.
The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 SEM and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips.