Description

Metrology equipment for electrically testing semiconductor devices.

DC Probe Station and Electronics

A Cascade Summit 12K probe station with 8-inch chuck is available for DC wafer probing. The system includes four high-precision Cascade 208 and 210 DC probe positioners with Kelvin probes, microscope, digital camera, and is coupled with a Temptronic TPO3000 ThermoChuck system with -50 to 200 °C chuck temperature control capability.

Everbeing EB-6 DC Probe Station

An Everbeing EB-6 high precision probe station is available for DC wafer probing. Four low noise, high precision probes are available along with a hot chuck, microscope, and digital camera. The EB-6 was donated to CNF by Everbeing in August 2016. Four high precision Keithley Source Measurement Units (SMU) with connected PC and software are used for voltage and current measurement.

Microwave Large-Signal Probe Station and Electronics

A Cascade Summit 11K probe station with 8-inch chuck is available for RF wafer probing. The system includes two Cascade RF probe positioners, two tuners for fundamental frequency, microscope, and digital camera. The load-pull system is capable of large signal RF measurement up to 20 GHz and -20 dBm maximum output power. Maury ATS software with a dedicated PC is available for controlling.

Microwave Small-Signal Probe Station and Electronics

A Cascade Summit 9600 probe station with 6-inch chuck is available for RF wafer probing. The system includes two Cascade RF probe positioners, microscope, digital camera, and is coupled with a Temptronic TPO3000 ThermoChuck system with -50 to 200 °C chuck temperature control capability. An Agilent E8364B PNA network analyzer is capable of RF measurement in 10 MHz to 50 GHz frequency range with 104 dB of dynamic range, 26 usec/point measurement speed, 32 channels, and 16,001 points, is available.

Millimeter-Wave Probe Station and Electronics

A MPI TS2000-IFE Series automated probe station with 1 μm precision is available for RF wafer probing. The system includes two RF probe positioners, microscope, and digital camera along with a MPI thermal chuck with temperature control between -60°C and +200 °C. An Anritsu ME7838G vector network analyzer (VNA) capable of single-sweep measurement from 10 MHz to 220 GHz with dynamic range of 120 dB at 10 MHz, 112 dB at 67 GHz, 108 dB at 110 GHz, and 100 dB at 145 GHz, and measurement speed of 310 ms for 401 points at 10 kHz IFBW, is available.

Zyvex Nanoprobes for Ultra SEM

The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 SEM and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips.