Metrology equipment for electrically testing semiconductor devices.
The Everbeing SR-4 manual 4-point probe station is used for measurements of sheet resistivity. It is used with a variety of current and voltage sources. This tool was donated to CNF by Everbeing in August 2016.
An Everbeing EB-6 high precision probe station is available for DC wafer probing. Four low noise, high precision probes are available along with a hot chuck, microscope, and digital camera. The EB-6 was donated to CNF by Everbeing in August 2016. Four high precision Keithley Source Measurement Units (SMU) with connected PC and software are used for voltage and current measurement.
Mapping 4 point Probe system. 1mohm/sq to 200 Mohm/sq sheet resistance. 200mm wafers capable.
This tool is configured around a Cascade Summit 12K probe station, including four Kelvin probes each mounted on a Cascade 208 or 210 probe positioner, an Agilent 4156C precision semiconductor parameter analyzer, an Agilent 4294A precision impedance analyzer, a Temptronic TPO3000 ThermoChuck system, a Kinetic Systems 1201 vibration-isolation table, and a personal computer running Keysight IC-CAP on Windows 10.
This tool is based on a Cascade Summit 9600 probe station on top of a Kinetic Systems 1201 vibration-isolation table. The probe station is equipped with two Cascade 103-754 x-y-z-θ probe positioners, a Mitutoyo 378-134-4 microscope (with long working distance and a built-in TV camera), and a 6"-diameter microchamber and thermal chuck (−50 to 200 °C). The thermal chuck is controlled by a Temptronic TPO3000 ThermoChuck system.
A Cascade Summit 11K probe station with a 200-mm wafer chuck is available for Terahertz large-signal probing. The tool includes Anritsu MS4647B 4-Port 70kHz-70GHz VNA, two VDI 110-170 GHz frequency extenders, power meters covering DC to THz range, and GSG or GSGSG probes for on-wafer probing. The tool is capable of both small- and large-signal RF measurements up to 170 GHz and 17 dBm power.
The tool is based on an MPI TS2000-IFE 200-mm automated probe station with micron precision. In the standard configuration, the tool includes two RF probes of GSG, GSSG or GSGSG types, a microscope, a digital camera, and a thermal chuck with temperature control between -60°C and +200 °C. Other DC and RF probes may be added. The probes, the microscope, and the chuck are all automatically controlled in x, y, and z directions with optical feedback. The RF signal is provided by an Anritsu 4-Port ME7838G vector network analyzer capable of a single sweep from 70 kHz to Fig. 2.
A Keithley C-V measurement system is coupled to the Everbeing Probe station and an Everbeing hot chuck capable of 300°C. The entire system is controlled by user-friendly PC software. Both high frequency and quasi-static measurements are available. Other measurements such as bias-temperature and zerbst C-t plots are also available.
The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 SEM and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips.