Metrology equipment for electrically testing semiconductor devices.

Everbeing EB-6 DC Probe Station

An Everbeing EB-6 high precision probe station is available for DC wafer probing. Four low noise, high precision probes are available along with a hot chuck, microscope, and digital camera. The EB-6 was donated to CNF by Everbeing in August 2016. Four high precision Keithley Source Measurement Units (SMU) with connected PC and software are used for voltage and current measurement.

Microwave Large-Signal Probe Station and Electronics

A Cascade Summit 11K probe station with 8-inch chuck is available for RF wafer probing. The system includes two Cascade RF probe positioners, two tuners for fundamental frequency, microscope, and digital camera. The load-pull system is capable of large signal RF measurement up to 20 GHz and -20 dBm maximum output power. Maury ATS software with a dedicated PC is available for controlling.

Millimeter-wave Small-Signal Probe Station and Electronics

This tool is based on a Cascade Summit 9600 probe station on top of a Kinetic Systems 1201 vibration-isolation table. The probe station is equipped with two Cascade 103-754 x-y-z-θ probe positioners, a Mitutoyo 378-134-4 microscope (with long working distance and a built-in TV camera), and a 6"-diameter microchamber and thermal chuck (−50 to 200 °C). The thermal chuck is controlled by a Temptronic TPO3000 ThermoChuck system. Normally, the probe station is configured for room-temperature measurements with the microchamber cover removed and the thermal chuck turned off.

Terahertz Probe Station and Electronics

A MPI TS2000-IFE Series automated probe station with 1 μm precision is available for RF wafer probing. The system includes two RF probe positioners, microscope, and digital camera along with a MPI thermal chuck with temperature control between -60°C and +200 °C. An Anritsu ME7838G vector network analyzer (VNA) capable of single-sweep measurement from 10 MHz to 220 GHz with dynamic range of 120 dB at 10 MHz, 112 dB at 67 GHz, 108 dB at 110 GHz, and 100 dB at 145 GHz, and measurement speed of 310 ms for 401 points at 10 kHz IFBW, is available.

Zyvex Nanoprobes for Ultra SEM

The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 SEM and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips.