Metrology equipment for electrically testing semiconductor devices.
The Everbeing SR-4 manual 4-point probe station is used for measurements of sheet resistivity. It is used with a variety of current and voltage sources. This tool was donated to CNF by Everbeing in August 2016.
An Everbeing EB-6 high precision probe station is available for DC wafer probing. Four low noise, high precision probes are available along with a hot chuck, microscope, and digital camera. The EB-6 was donated to CNF by Everbeing in August 2016. Four high precision Keithley Source Measurement Units (SMU) with connected PC and software are used for voltage and current measurement.
A Keithley C-V measurement system is coupled to the Everbeing Probe station and an Everbeing hot chuck capable of 300°C. The entire system is controlled by user-friendly PC software. Both high frequency and quasi-static measurements are available. Other measurements such as bias-temperature and zerbst C-t plots are also available.
The Zyvex S-100 Nanoprobes are installed on the Zeiss Ultra-55 SEM and operate under vacuum during imaging or with the beam blanked. The S-100 consists of four individually controlled nanoprobes which can be placed with a precision of five nanometers. The probes have a minimum tip radius of fifty nanometers for precision measurements, but larger probes are available for MEMS or other applications requiring more robust tips.