Chemical hoods, building systems, and other parts of the laboratory infrastructure.

Bottle Washer

The bottle washer is for rinsing empty chemical bottles before disposing of the empty bottles in the trash. Report any problems with the system using the trouble report system above.

General Chemistry Hoods

The CNF has a variety of fume hoods for wet processing of samples. Hoods are available for acid and base/solvent processing. Spin Rinse Dryers (SRD) are available at most hoods for drying wafers after processing.

Measurements of the etch rates for common etchants is available below.

Spin Rinse Dryers

Spin Rinse Dryers are available at most chemical hoods. Sample sizes are 4" wafers and 4", 5", or 6" masks, depending on the SRD.

The Verteq spin rinse dryer is a drying system that uses centrifugal forces to dry the surface of a substrate. The liquid on the substrate surface is spun off and drained from the bowl while liquid droplets on the drying chamber surfaces are evaporated. There are six Verteq SRDs in the cleanroom.