Notification
JEOL has restarted the emitter which shut down last Friday. Everything came up as before except beam current is about 0.5% higher than before. It will come back down slowly over the next couple days. This should not affect lithography unless clock speeds of the job were close to 100 MHz. If in doubt, measure the beam current with CURRNT, enter it into the STDCUR line in the JDF file, and recompile.
Notice Area