Notification
The UPS that supplies the JEOL e beam lithography systems shut off during the night of August 22 due to a ground fault in outdoor lighting. The UPS batteries drained completely and because of their age it was not possible to recharge them. New batteries will be installed as soon as possible.

Calibration has been done on the JEOL 9500 for 0.2, 0.5, 1, 2, 5, 10 and 20 nA beam currents, all errors have been cleared, and a dummy exposure has been executed.

On the JEOL 6300, calibration has been done at 1 nA and other calibrations are being done now.