For training, please contact the lab manager for the High Frequency Test Lab (HFTL).
This tool is based on a Cascade Summit 9600 probe station on top of a Kinetic Systems 1201 vibration-isolation table. The probe station is equipped with two Cascade 103-754 x-y-z-θ probe positioners, a Mitutoyo 378-134-4 microscope (with long working distance and a built-in TV camera), and a 6"-diameter microchamber and thermal chuck (−50 to 200 °C). The thermal chuck is controlled by a Temptronic TPO3000 ThermoChuck system. The RF signal path consists of an Agilent E8364B vector network analyzer, two flexible 2.4-mm-diameter coaxial cables, two Agilent 11612V bias tees (capable of pulsed biases), two 2.4-mm semflexible cables, and two 2.4-mm probes, although 2.9-mm probes can also be used with 2.4mm-2.9mm adapters. The DC bias is supplied by an Agilent 4156C precision semiconductor parameter analyzer. Both DC and RF signals are controlled by a personal computer running Keysight IC-CAP on Windows 10.
- Cascade Summit 9600 Probe Station with a 150-mm wafer chuck and a microchamber
- Temptronic TPO3000 ThermoChuck System, −50 °C to +200 °C
- Two Cascade RF probe positioners and two DC probe positioners
- Agilent E8364B PNA Network Analyzer, 10 MHz to 50 GHz
- Agilent 4156C Precision Semiconductor Parameter Analyzer
- Keysight IC-CAP PathWave Device Modeling software
- MPI QAlibria RF calibration software