HFTL Terahertz Large-Signal Probe Station, 4-Port, 70kHz-170GHz, 200mm

For training, please contact the manager for the High Frequency Test Lab (HFTL).

Compatibility:
Not Applicable
Manager
Lei Li
Backups:
James Hwang
Image of Microwave Large-Signal Probe Station and Electronics

A Cascade Summit 11K probe station with a 200-mm wafer chuck is available for Terahertz large-signal probing. The tool includes Anritsu MS4647B 4-Port 70kHz-70GHz VNA, two VDI 110-170 GHz frequency extenders, power meters covering DC to THz range, and GSG or GSGSG probes for on-wafer probing. The tool is capable of both small- and large-signal RF measurements up to 170 GHz and 17 dBm power.

Capabilities
  • Anritsu MS4647B 4-Port 70kHz-70GHz VNA
  • Cascade 11K Probe Station
  • 200-mm wafer chuck
  • large-signal banded RF measurements
  • 17-dBm maximum input power
  • Single-end and differential measurement
  • Other frequency extenders may be added to further extend the input power and frequency range up to 1.5 THz.
Equipment Information Sheet