Tool Location
106

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Compatibility:
Not Applicable
Manager
Tom Pennell

The AJA Quantum Materials Deposition System is a multifunctional phyisical vapor deposition that is dedicated to quantum materials research activities. The tool has a loadlock with in situ ion mill and controlled oxidation system capable of oxidizing films at 10 and 100 Torr. The main chamber has 3 standard magnetron sputter sources and an adjustable proximity sputter source. The chamber also has an in situ ion mill for substrate cleaning and a 6 pocket electron beam evaporation system with a loadlocked crucible exchange.

Capabilities

•Materials – Ti, Al, Nb, Ta

•Loadlock

  • Ion Mill
  • Controlled Oxidation Source

•Main Chamber (UHV – Cryo Pump – 1E-9 Torr)

  • 6 Pocket Electron Beam Evaporator
  • Loadlocked Crucible Exchange
  • Ion Mill
  • 3 Confocal Sputter Guns (2” targets)
  • Off Axis Adjustable Proximity Sputter Gun (3” Target)
Equipment Information Sheet