Training
For training, please contact the Tool Manager(s).
Compatibility:
Manager
Body
The AJA Quantum Materials Deposition System is a multifunctional phyisical vapor deposition that is dedicated to quantum materials research activities. The tool has a loadlock with in situ ion mill and controlled oxidation system capable of oxidizing films at 10 and 100 Torr. The main chamber has 3 standard magnetron sputter sources and an adjustable proximity sputter source. The chamber also has an in situ ion mill for substrate cleaning and a 6 pocket electron beam evaporation system with a loadlocked crucible exchange.