Area: Photolithography
Area Notice Title Notification
Photolithography Photolithography Training Sessions for the week of March 25th General Photolithography training will NOT be held this week.

Heidelberg mask writer training can be scheduled by contacting the tool owners.

ABM Mask aligner, MA6 Mask aligner, and SussTec SB8e Bonder trainings may be arranged by contacting Edward Camacho.
Photolithography ASML DUV Stepper is *DOWN* The ASML DUV Stepper is DOWN. The ARMS system has failed. ASML will be here early next week.
Area: Electron-Beam Lithography
Area Notice Title Notification
Electron-Beam Lithography Stone work begins around Duffield Please note there may be significant acoustic noise near the SEMs and e beam lithography systems during the day. Scott Albrecht, College of Engineering Facilities Coordinator, sent us the following message:

Starting on Monday 2/18 occupants can expect to see construction fence being setup on the North, West and South sides of Duffield. Early Tuesday morninga dumpster, excavator and telehandler will be delivered and stored within the construction fence. Removal of the coping stone and demolition of the site walls will begin shortly after. We plan to start on the North wall of Duffield and will be using a small excavator inside the construction fence to begin removing capstones. Demolition work will continue through the end of the week.

The following week, 2/25 - 3/1, we will have the sidewalk shutdown from the corner of Hoy and Campus Rd to the easternmost crosswalk at the intersection of East Ave and Campus Rd. This shutdown includes the ADA ramp at the North entrance to Phillips. There will be fencing, barricades and signage in place to redirect all foot traffic. Access to and egress from the North entrance of Duffield will be maintained at all times as will non-ADA access to Philips.

In summary there are changes to the pedestrian paths on the north and west sides of the building for the next 4-5 months please be aware and obey the signage. I will send updates as I get them. Thank you and be safe!
Electron-Beam Lithography ThinLinc workstation has been installed in JEOL 9500 room The JEOL 9500 room now has a ThinLinc workstation which can be used to run Coral, edit and compile and check job files offline, run LayoutBEAMER and TRACER, and use a web browser. Thank you, CNF IT!
Electron-Beam Lithography Graphical interface for compiling schedule files on the JEOL 6300 On the Desktop screen of the JEOL 6300, in both workspaces, there is now a CompileSDF application which can be used to compile schedule files instead of typing the schd command in a terminal window. It uses JEOL's python scripting system and was written by Greg Holloway at the University of Waterloo and modified for use at CNF. After compiling, you can click the ACHK button to view the layout of the job. Please try it out and send any comments to the staff.
Electron-Beam Lithography JEOL 9500 emitter has shut off While a JEOL engineer was logged in to the JEOL 9500 to examine a user's job, he noticed that there was a high voltage off error. The emitter shut down at 7:29 pm on Friday, March 22. We will work with JEOL to fix the problem.
Electron-Beam Lithography JEOL 9500 emitter has shut down When a JEOL engineer connected over the internet to the JEOL 9500, he noticed that it has had a high voltage off error since Friday at 7:29 pm. We will work with JEOL to run the emitter back up to 100 kV. If there are no serious problems it should be available again by the end of the day on Tuesday, March 26.
Area: SEMS & Microscopes
Area Notice Title Notification
SEMS & Microscopes Stone work begins around Duffield Please note there may be significant acoustic noise near the SEMs and e beam lithography systems during the day. Scott Albrecht, College of Engineering Facilities Coordinator, sent us the following message:

Starting on Monday 2/18 occupants can expect to see construction fence being setup on the North, West and South sides of Duffield. Early Tuesday morninga dumpster, excavator and telehandler will be delivered and stored within the construction fence. Removal of the coping stone and demolition of the site walls will begin shortly after. We plan to start on the North wall of Duffield and will be using a small excavator inside the construction fence to begin removing capstones. Demolition work will continue through the end of the week.

The following week, 2/25 - 3/1, we will have the sidewalk shutdown from the corner of Hoy and Campus Rd to the easternmost crosswalk at the intersection of East Ave and Campus Rd. This shutdown includes the ADA ramp at the North entrance to Phillips. There will be fencing, barricades and signage in place to redirect all foot traffic. Access to and egress from the North entrance of Duffield will be maintained at all times as will non-ADA access to Philips.

In summary there are changes to the pedestrian paths on the north and west sides of the building for the next 4-5 months please be aware and obey the signage. I will send updates as I get them. Thank you and be safe!
SEMS & Microscopes Zeiss Supra SEM Emitter and Apertures Replacement continuing through 3/25 Work on the Supra will continue through Monday, March 25. The column needed a second bakeout and some beam alignment still needs to be done.
Area: Packaging & Misc Processing
Area Notice Title Notification
Packaging & Misc Processing Photolithography Training Sessions for the week of March 25th General Photolithography training will NOT be held this week.

Heidelberg mask writer training can be scheduled by contacting the tool owners.

ABM Mask aligner, MA6 Mask aligner, and SussTec SB8e Bonder trainings may be arranged by contacting Edward Camacho.