Area Photolithography
Area Notice Title Notification
Photolithography ASML DUV Stepper and Gamma *AVAILABLE* The ASML DUV stepper and the SussTec Gamma are UP and AVAILABLE for use. Please let us know if you have any problems.
Area Electron-Beam Lithography
Area Notice Title Notification
Electron-Beam Lithography JEOL 9500 condition files are updated All the standard condition files have been checked and updated if necessary. Please call (not email) the staff if you have a problem with any of them.