Area: Photolithography
Area Notice Title Notification
Photolithography Heidelberg DWL2000 *WARNING* The DWL2000 mask writer is still having Optical Focus issues. We will have the tool set for PNEUMATIC focus until further notice. This may result is less accurate focus for fine features.
Photolithography ASML DUV Stepper and SussTec Gamma *UNAVAILABLE* June 18th - 20th The ASML and the Gamma will be set for 200mm wafers June 18-20. Please plan accordingly.