Tool Location
111

For training, please contact the Tool Manager(s).

Compatibility:
2 - Silicon Based Substrates and Select Refractory Metals
Additional Restrictions
  • Metals should not be exposed to plasma
Manager
Jeremy Clark

Includes a RAD-2500m/8 Semi-Automatic Wafer Mounter for mounting 200mm, 150mm, 100mm wafers as well as pieces to dicing frames for etching in the Plasma-Therm Singulator, as well as a Semi Corp Model 365 UV Exposure System for releasing the wafer and frame from the tape after etching.

Equipment Information Sheet