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Disco Wafer Grinder

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Tool Location
224
Training

For training, please contact the Tool Manager(s).

Compatibility:
3 - Silicon, III-V Compound Semiconductor, Glass and Metal Category
Manager
Christopher Alpha
Body

The DA810 is a compact, automatic grinder for thinning of work pieces up to 8" in diameter. It has one spindle and one chuck table and is designed to process a variety of materials including Silicon, Glasses, Sapphire, Silicon Carbide and III-V's.

Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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