SubTitle
Alignment microscope for JEOL 9500
Training

For training, please contact the Tool Manager(s).

Before training you should already have gone through the general ebeam lithography training and be familiar with the operation of the 9500.

Additional Restrictions
    Manager
    Backups:
    Body

    Used for doing pre-alignment of ebeam exposures on the 9500. The stage has encoders that are used to determine the locations of P and Q marks used for aligned exposures. The accompanying software can then be used to calculate the X and Y offsets for use in the schedule file.