Alignment microscope for JEOL 9500

For training, please contact the Tool Manager(s).

Before training you should already have gone through the general ebeam lithography training and be familiar with the operation of the 9500.

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
Manager
Alan R. Bleier
Backups:
John Treichler
JEOL PreAlignment System

Used for doing pre-alignment of ebeam exposures on the 9500. The stage has encoders that are used to determine the locations of P and Q marks used for aligned exposures. The accompanying software can then be used to calculate the X and Y offsets for use in the schedule file.

Equipment Information Sheet