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SAMCO UV-1 UV/Ozone

Equipment Menu

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Training

For training, please contact the Tool Manager(s).

Compatibility:
4 - Glass and Metal Categories
Manager
Philip Schneider
Backups:
Jeremy Clark
Samco
Capabilities

Hotplate capable of 300C, UV lamp, Ozone generation.

Applications

Removal of organic contamination, descumming of resist, UV curing of resist, stripping resist.

Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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