- Samples up to 6 diameter.
- Check with machine manager before etching samples with non-standard materials.
- No Cadmium or Zinc films and substrate materials!
|Tool category 1/1E, 2, and 3 materials|
Silicon Based Substrates and Films
|No CNF Class A metals|
|III/V compound Semiconductors||No Exposed CNF Group B metals- metals can be buried/covered with staff approval|
|Glass Substrates||Cannot be used as an etch stop|
|PECVD and ALD Films|
|Buried Class B Metals with approval|
|Organic/Bio Materials prepped w/o Salt Buffers|
|Cured organics and baked Photoresist||No High Vapor pressure materials|
Material compatibility TBD.