AJA Ion Mill
Additional Restrictions
- Samples up to 6 diameter.
- Check with machine manager before etching samples with non-standard materials.
- No Cadmium or Zinc films and substrate materials!
Return to list of compatibility categories
Allowed | Not Allowed |
---|---|
Tool category 1/1E, 2, and 3 materials | |
Silicon Based Substrates and Films |
No CNF Class A metals |
III/V compound Semiconductors | No Exposed CNF Group B metals- metals can be buried/covered with staff approval |
Glass Substrates | Cannot be used as an etch stop |
PECVD and ALD Films | |
Buried Class B Metals with approval | |
Organic/Bio Materials prepped w/o Salt Buffers | |
Cured organics and baked Photoresist | No High Vapor pressure materials |
Material compatibility TBD.