Training

Use of hot plates is covered in the general photolithography training held ever week on Tuesday at 1:30pm in the photolithography area. If there is no general photolithography training scheduled, contact the tool managers by email for a short training session.

Additional Restrictions

None

    Manager
    Body

    General use hot plate for large substrates.

    Capabilities

    Hot plate for heating 300 mm wafers, and also other large substrates such as large glass plates used for displays.