Training
Use of hot plates is covered in the general photolithography training held ever week on Tuesday at 1:30pm in the photolithography area. If there is no general photolithography training scheduled, contact the tool managers by email for a short training session.
Compatibility:
Additional Restrictions
None
Manager
Backups:
Body
General use hot plate for large substrates.
Capabilities
Hot plate for heating 300 mm wafers, and also other large substrates such as large glass plates used for displays.