SubTitle
Leica CPD300 critical point dryer
Training

For training, please contact the Tool Manager(s).

Additional Restrictions
Manager
Body

The Leica CPD300 is a small footprint, easy to use critical point dryer. The touch screen makes editing and running simple and fast. The tool has a maximum substrate size of 2" which minimizes the amount of solvent used and decreases the cycle time.

Capabilities

Maximum substrate size of 2

Applications

Used for drying MEMS structures after release and preventing pattern collapse of high aspect ratio features.