SubTitle
Leica CPD300 critical point dryer
Training
For training, please contact the Tool Manager(s).
Compatibility:
Additional Restrictions
- No Biological Materials
- No acids or acetone
- Only materials that are compatible with alcohols
Manager
Backups:
Body
The Leica CPD300 is a small footprint, easy to use critical point dryer. The touch screen makes editing and running simple and fast. The tool has a maximum substrate size of 2" which minimizes the amount of solvent used and decreases the cycle time.
Capabilities
Maximum substrate size of 2
Applications
Used for drying MEMS structures after release and preventing pattern collapse of high aspect ratio features.