For training, please contact the Tool Manager(s).
- Only use wafer and piece sizes compatible to chucks
The micro drill is a custom made drill that is configured for 3", 4", and 6" wafers as well as glass slides. The drill is capable of drilling silicon, quartz, or glass with diamond coated micro drills. With three collets holding drill shanks from 0.040" to 1/8", it allows a variety of drill sizes ranging from 0.006" (~150 µm) to 0.065" (1650 µm).
Although the actual size of the finished hole is 60 - 70% larger than the drill, the micro drill is a quick and efficient method for through hole making for microfluidic devices. This tool is located in Room 224.
- Glass slides
- Silicon, quartz, and glass
- Drill sizes from 0.006