SubTitle
OEM Aluminum Nitride Sputtering System
Training
For training, please contact the Tool Manager(s).
Compatibility:
Additional Restrictions
- CMOS compatible metals only at this time.
- - Adhesives are not allowed (scotch tape, Kapton tape, glues, epoxies, greases, etc are not allowed) in the chamber. Only use clips to secure substrates.
Manager
Backups: