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OEM Endeavor M1

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SubTitle
OEM Aluminum Nitride Sputtering System
Training

For training, please contact the Tool Manager(s).

Compatibility:
2 - Silicon Based Substrates and Select Refractory Metals
Additional Restrictions
  • CMOS compatible metals only at this time.
  • - Adhesives are not allowed (scotch tape, Kapton tape, glues, epoxies, greases, etc are not allowed) in the chamber. Only use clips to secure substrates.
Manager
Tom Pennell
Equipment Information Sheet

Please acknowledge the CNF in your presentations, posters, and publications.

This material is based upon work supported by the National Science Foundation under Grant No. NNCI-2025233. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

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