OEM Aluminum Nitride Sputtering System

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Compatibility:
2 - Silicon Based Substrates and Select Refractory Metals
Additional Restrictions
  • CMOS compatible metals only at this time.
  • - Adhesives are not allowed (scotch tape, Kapton tape, glues, epoxies, greases, etc are not allowed) in the chamber. Only use clips to secure substrates.
Manager
Tom Pennell
Equipment Information Sheet