Small chamber sputtering system for coating SEM samples

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Only for use on materials going into the SEM or e-beam lithography systems.
Manager
Mac McMurdy
Backups:
Alan R. Bleier
Hummer SEM Coater

The CNF has two small sputter systems for coating samples prior to SEM imaging or electron beam lithography. One machine is setup for Gold while the other system is setup for Gold / Palladium. The manual machines allow for quick coating of conductive films to assist in electron beam work

Equipment Information Sheet