SubTitle
Automated Tools for Developing Wafers
Training
Web-based training. Sign up for: RSRCH - CNF - Hamatech in Workday Learning.
Once you watch the training video, email the tool manager to get tool permissions.
Compatibility:
Additional Restrictions
- Whole wafers or masks sized for available chucks only
Manager
Backups:
Body
The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, 150 mm, and 200 mm wafers. Chucks are also available for 4", 5", 6", and 7" Photomasks. Standard developers are available on each tool.
Capabilities
- 3" Wafers
- 100mm Wafers
- 150mm Wafers
- 200mm Wafers
- 4", 5", 6", 7" Photomasks
Processes Available
- AZ 726MIF 0.26N Developer
- Dow MF321 0.21N Developer