Spinner located in the fume hood of 224 Duffield for 4-inch wafers

For training, please contact the Tool Manager(s).

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Wear eye protection, face shield and thin nitrile gloves when using the spinner in the fume hood.
Manager
Xinwei Wu
Backups:
Michael Skvarla

The Laurel spinner is a small stand-alone spinner, It is operated in the solvent hood in 224 Duffield. The most common use is to spin PDMS or Sigmacoat onto 4-inch wafers. 25-75 mm Corning glass slides and 100-mm petri dishes have also been spun in the tool. No larger substrates will fit. 

Capabilities
  • Spin coating 500-3000 rpm.
Applications
  • Spin coating thin layers of PDMS
  • Spin coating Sigmacoat antistiction treatment.
Equipment Information Sheet
Resources:
Laurell spincoater pamphlet
Laurell spin coater manual