Automated Tools for Developing Wafers

Web-based training. Sign up for: RSRCH - CNF - Hamatechs

 

Once you watch the training video, email the tool manager to get tool permissions. 

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Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Whole wafers or masks sized for available chucks only
Manager
Garry Bordonaro
Backups:
Giovanni Sartorello
Hamatech Wafer Processor

The CNF has two Hamatech-Steag wafer processors for developing of wafers. Spray and puddle processes are available with wafer chucks for 3 inch, 100 mm, 150 mm, and 200 mm wafers. Chucks are also available for 4", 5", 6", and 7" Photomasks. Standard developers are available on each tool.

Capabilities
  • 3" Wafers
  • 100mm Wafers
  • 150mm Wafers
  • 200mm Wafers
  • 4", 5", 6", 7" Photomasks
Processes Available
  • AZ 726MIF 0.26N Developer
  • Dow MF321 0.21N Developer
Equipment Information Sheet
Resources:
Instruction Sheet
Refilling Instructions