SubTitle
Tool for Releasing Dicing Tape and UV Curing of Photoresist
Training
For training, please contact the Tool Manager(s).
Compatibility:
Additional Restrictions
- 12" x 12" x 3" Substrate Tray
Manager
Body
The Jelight 144AX is a DUV exposure system used at CNF for Dicing Tape release and curing photoresist before hardbake. The gridlamp has ~30mW/cm2 output at 254nm. For resist curing, this energy will cause photoresist to crosslink at the surface, thus preventing resist flow at elevated temperatures required for hardbaking.