Complete CULearn course:

When done, contact the tool manager for in-person training.

Compatibility:
5 - Class A and B Metals and Compounds
Additional Restrictions
  • Samples must be clean
  • Resist must be fully cured
Manager
Mac McMurdy
Backups:
Jeremy Clark
James Crawford
Giovanni Sartorello

The DektakXT is a stylus profilometer with 4 A repeatability. The tool is loaded with a 12.5 um radius of curvature diamond-tipped stylus. We have sample stages to accommodate wafer pieces, as well as full size wafers up to 200mm. The software gives us motorized stage translation and rotation, as well as sequencing for up to 200 sites. The Vision64 software can also use the tool measurements to create a 3D map of the scanned surface.

This profilometer is meant for those with advanced profilometry needs.

Equipment Information Sheet