Training
For training, please contact the Tool Manager(s).
Compatibility:
Additional Restrictions
- No films thicker than 50nm or 500 loops without permission of the tool manager
- All sizes from pieces to 200mm wafers allowed
Manager
Backups:
Processes Available
Thermal ALD
- Al2O3
- Pt (Oxygen or low temperature Ozone)
- Ru
- Pd (under development)