Tool for measuring step heights and surface roughness

For training, please contact the Tool Manager(s).

Additional Restrictions
  • Hard substrates (glass, plastic, semiconductor materials) allowed
  • Soft substrates (polymers like PDMS) possibly allowed AFTER contacting tool manager.
  • Sample size: up to 150 mm substrates; up to 5 mm thick

Profilometry allows users to get a 2D trace of surface topographic features through contact with a stylus. The Dektak profilometer determines film thickness, feature heights in microfluidic devices, 3D-printed devices or feature depths in laser cut samples. It can also show the surface roughness of substrates.

  • Measurement Range: 100 Angstrom to 1 mm deep.
  • Resolution: 1-200 Angstroms depending on measurement range
  • Sample size: up to 150 mm (6
  • Scan length: 50 to 30,000 microns
  • 12.5 and 25 micron-wide stylus available
  • Stylus force range: 1 to 15 mg.
  • X-Y stage translation: 20 x 80 mm, rotates 360 degrees.
  • Photo capability with 70 to 280 X camera (3.5 to 0.86 mm field of view)
Processes Available

Measurement parameters available:

  • Roughness (Ra, Rq, Rp, Rv, Rt, Rz)
  • Waviness (Wa, Wq, Wp, Wv, Wt)
  • Step Height (avg. step ht., avg. ht., max. peak, max. valley, max. ht., peak to valley, high spot count, peak count)
  • Geometric measurements (area, slope, volume, radius, perimeter, bearing, ratio, Sm)
  • Measures hard or soft (elastomer) substrates